SEMI S23-Semiconductor equipment energy consumption assessment standard, helping double carbon & sustainable development

Double Carbon Target and SEMI S23 Energy Efficiency Evaluation

As the world’s largest energy producer and consumer, China has clearly put forward a dual carbon goal of striving to achieve carbon peaks by 2030 and carbon neutrality by 2060.

The semiconductor industry is just a high energy consumption industry. Take TSMC as an example. According to statistics, from 2010 to 2019, electricity consumption increased by 223.8%. TSMC’s electricity consumption in 2020 is 6.3 billion kWh. TSMC’s 3nm plant will be put into operation in 2022, and the annual electricity consumption may reach 7.7 billion kWh, which is 3% of Taiwan’s electricity consumption.

In the current era of rising energy costs and the continuous increase of carbon neutral policies in the future, semiconductor companies cannot ignore the high expenditures caused by the increase in energy costs. The energy consumption of the equipment puts forward more stringent requirements.

Semiconductor manufacturing equipment is a high-precision manufacturing equipment, which requires complex working conditions such as clean space, constant temperature, high temperature, high pressure, vacuum, strong electromagnetic field, purge, and cooling during use. In addition, the core equipment operates almost 24 hours a day, 365 days a year, and these situations will undoubtedly cause astonishing energy consumption.

It is necessary to evaluate the energy efficiency of semiconductor manufacturing equipment. Only by obtaining an accurate evaluation result of the current equipment, can it be possible to achieve the goal of energy saving and emission reduction when the equipment is iteratively updated. As early as 2005, SEMI issued a guiding standard-SEMI S23, which is called the energy, power and material efficiency specification for semiconductor process equipment in Chinese. It not only introduces and clarifies the concepts related to efficiency, but also introduces the measurement methods and analysis tools in detail, and provides guidance for continuous improvement of usage rate and efficiency. It is the most authoritative standard that can be used as a reference for the energy efficiency evaluation of semiconductor equipment.

Semiconductor manufacturers can effectively estimate and allocate energy use based on the S23 evaluation report. Equipment manufacturers can also make continuous improvement plans on this basis, which is one of the key system documents for equipment manufacturers to achieve energy-saving goals.

The SEMI S23 standard gives the measurement method and improvement direction & suggestions for the power consumption (Exhaust, Vacuum, CDA, N2, UPW, DIW, electric energy) supplied by the factory and the heat load caused by the equipment to the clean room. The content of the standard can be divided into three main parts, the meaning of energy consumption & energy saving, the measurement and calculation methods of each power supply and heat load consumption in different modes of the equipment, and the establishment and optimization of the energy saving management process of equipment manufacturers.

(1) The meaning of energy consumption & energy saving

SEMI S23-Semiconductor equipment energy consumption assessment standard, helping double carbon & sustainable development

Energy consumption is not a simple number, and energy saving is not a simple subtraction.

To evaluate energy consumption and then formulate the correct energy saving plan, two very important concepts are “Energy Consumption” and “Performance Metric”. Energy consumption is the power energy consumed by the equipment each year. The standard measurement and calculation methods are given in this standard; the performance index is the process performance parameter of the process equipment, which is a dynamic change in most cases and is difficult to quantify the same as the energy consumption. index of.

Whether it is a manufacturer of process equipment or an end user, if you do not view energy conservation from a strategic point of view, not only will the benefits you get will be greatly reduced, but even more unfavorable is that you will miss opportunities in the competition.

(2) The measurement method of each power supply and heat load consumption in different modes of the equipment

  SEMI S23-Semiconductor equipment energy consumption assessment standard, helping double carbon & sustainable development

The standard provides four basic modes: process, idle, rest, and sleep, and stipulates that the process time is 70% of the whole year, downtime is 5%, and idle is 8% , The remaining 17% is distributed between idle, rest and sleep.

For all kinds of power supply, the concept of “conversion coefficient” is given in the standard. Whether it is DIW or exhaust air, it can be converted into equivalent electric energy through a coefficient.

(3) Establishing and optimizing the energy-saving management process of equipment manufacturers

  

Equipment manufacturers should establish a sound energy-saving evaluation and improvement system, organize a professional team, and set clear goals. It is necessary to continuously optimize the process (for example, multiple design and process reviews every year) and continuous refinement of the design (for example, continue to find and optimize the impact factors of energy consumption). The standard enumerates very detailed requirements and recommendations. A very important one is to maintain information synchronization and technical exchanges with end users, so that energy-saving solutions can finally be implemented and the process equipment is in the same energy-saving blueprint of both parties.

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